Optical Scanning
Profilometry (OSP)
  Surface
Mapping
The MicroXAM surface mapping microscope (ADE
Phase-Shift) is a non-contact, three-dimensional profilometer.
The capabilities of the microscope include measurements of
roughness, finish and texture of surfaces ranging from highly-polished
optics and wafers to rough surfaces, such as rolled metals,
plastics, and ceramics. In addition, the step-height feature
allows imprinted or elevated surfaces to be mapped, such as
micromachined parts or imprinted text. We can quantitatively
characterize surface features at subnanometer resolutions.
Measurement and Software Analysis
- 3-D interferometric surface mapping: roughness,
waviness, form
- Magnifications of 5X, 10X, 20X, and 50X
- Standard 2D and 3D surface statistics including
summit and valley analyses and University of Birmingham
specified S-parameters
- Comprehensive graphical software for the
acquisition, analysis, manipulation and visualization of
data
- Calculation of surface statistics including
summit and valley analysis
- Fourier and autocovariance analysis and surface
filtering
- Polynomial fitting, data filtering, scaling,
masking and interpolation
Interactive zoom
- X-Y and line segment profiles
- 3D wire, hybrid and solid plots
- Area difference plot for step height measurement
- Fourier analysis for visualizing and characterizing
periodic structures in surface maps
- Stitching of measurements to form a large
scale, high-density map
Applications
Examination of small parts and semiconductors.
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